Welcome to the InfoSci Platform
Sliding Mode Control of a 2D Torsional MEMS Micromirror with Sidewall Electrodes

Sliding Mode Control of a 2D Torsional MEMS Micromirror with Sidewall Electrodes

Hui Chen, Manu Pallapa, Weijie Sun, Zhendong Sun, John T. W. Yeow
Copyright: © 2013 |Volume: 3 |Issue: 1 |Pages: 11
ISSN: 2156-1664|EISSN: 2156-1656|EISBN13: 9781466631335|DOI: 10.4018/ijimr.2013010102
Cite Article Cite Article

MLA

Chen, Hui, et al. "Sliding Mode Control of a 2D Torsional MEMS Micromirror with Sidewall Electrodes." IJIMR vol.3, no.1 2013: pp.16-26. http://doi.org/10.4018/ijimr.2013010102

APA

Chen, H., Pallapa, M., Sun, W., Sun, Z., & Yeow, J. T. (2013). Sliding Mode Control of a 2D Torsional MEMS Micromirror with Sidewall Electrodes. International Journal of Intelligent Mechatronics and Robotics (IJIMR), 3(1), 16-26. http://doi.org/10.4018/ijimr.2013010102

Chicago

Chen, Hui, et al. "Sliding Mode Control of a 2D Torsional MEMS Micromirror with Sidewall Electrodes," International Journal of Intelligent Mechatronics and Robotics (IJIMR) 3, no.1: 16-26. http://doi.org/10.4018/ijimr.2013010102

Export Reference

Mendeley
Favorite Full-Issue Download

Abstract

This paper presents a sliding mode control scheme to improve the positioning performance of a 2-Degree-of-freedom (DOF) torsional MEMS micromirror with sidewall electrodes. The stability of closed-loop system is proved by Lyapunov stability theorem under the existence of bounded parameter uncertainties and external disturbances. Furthermore, the performance of the closed-loop system is illustrated by experimental and simulation results which verify that the feasibility and effectiveness of the proposed scheme. The results demonstrated that the torsional MEMS micromirror with the proposed sliding mode controller has a good transient response and tracking performance.

Request Access

You do not own this content. Please login to recommend this title to your institution's librarian or purchase it from the IGI Global bookstore.